Get Lam 9400

The Lam 9400 form is a crucial document for monitoring fault detection and classification in the Silicon Trench etching process. This guide aims to provide clear and comprehensive instructions to help users effectively complete the form online, regardless of their level of experience.

Follow the steps to fill out the Lam 9400 online.

1. Press the ‘Get Form’ button to access the Lam 9400 form and open it in your browser.
2. Begin by filling in the section that requests basic information about the process and tool used. Input the specific details regarding the Lam TCP 9400 PTX tool and the type of Silicon trench process being implemented.
3. In the multi-step recipe section, outline the phases of your etching process, specifying breakthrough and main etch stages. Ensure clarity and accuracy in describing each step.
4. Provide detailed observations related to the main etch stability, efficiency of the Wafer-less Auto Clean, and preventive maintenance checks, focusing on parameters like electron collision rate.
5. Document any additional information regarding the effects of varying process conditions and potential tool faults. This should include observations from the fault detection and classification sections.
6. Review the filled sections for accuracy and completeness, making sure all required information has been provided.
7. Once you have filled out all relevant sections, save your changes to the document. You can download, print, or share the Lam 9400 form as needed.

Complete your Lam 9400 form online today for efficient process monitoring!