Get E-beam Job Submission Form - Isnc - Ucla - Isnc Cnsi Ucla

This guide provides clear and supportive instructions on how to complete the E-beam Job Submission Form at UCLA CNSI. By following these steps, users can ensure that all necessary information is accurately provided for optimal processing.

Follow the steps to successfully complete your submission.

1. Click 'Get Form' button to obtain the form and open it in the editor.
2. Fill in the contact information section. Include your job number (if known), the current date, your name, group affiliation, badge number, recharge ID if known, and your preferred contact number or email.
3. In the pattern information section, provide the critical dimensions in nanometers (nm), the file name for the GDS format, and resolution/BSS if known. Specify the pattern size in both the X and Y dimensions with units.
4. Proceed to the e-beam settings and resist information. Enter the beam current in nanoamperes (nA), dose in microcoulombs per square centimeter (µC/cm²), and dose step if applicable. Include the job or script name for staff if required, and provide the resist type, thickness, and spin rate information.
5. Complete the layout step, repeat, and sample information. Indicate the number of cells in both X and Y, the sample size, pitch in both dimensions, and the sample materials you are using. Additionally, specify how many samples you will provide.
6. If alignment information is necessary, select the marker shape (choose ‘circle’ or ‘rectangle’), indicate the marker size in micrometers (µm), and specify the marker type (positive or negative). Provide local and global marker coordinates based on the layout center.
7. Fill out the finance charges information. This includes spaces for accepted date and finish date for staff, charges for machine time, staff time, and any additional charges. This section is intended for staff use.
8. Sign and date the form. Include any comments that may provide additional context or information.
9. Review all entered information for accuracy, then save your changes, download, print, or share the form as necessary.

Complete your E-beam Job Submission Form online now for efficient processing!